[Back]

@inproceedings{TUW-288154,
    author = {Lenz, Christoph and Scharinger, Alexander and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{A} {N}ovel {S}urface {M}esh {C}oarsening {M}ethod for {F}lux-{D}ependent {T}opography {S}imulations of {S}emiconductor {F}abrication {P}rocesses},
    booktitle = {{B}ook of {A}bstracts of the {I}nternational {C}onferences on {S}cientific {C}omputing in {E}lectrical {E}ngineering ({S}{C}{E}{E})},
    year = {2020},
    pages = {99--100},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2020/CP2020_Lenz_1.pdf},
    note = {talk: {I}nternational {C}onferences on {S}cientific {C}omputing in {E}lectrical {E}ngineering ({S}{C}{E}{E}), {E}indhoven, {T}he {N}etherlands; 2020-02-16 -- 2020-02-20}
}