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@article{TUW-290096,
    author = {Cervenka, Johann and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {S}acrificial {E}tching},
    journal = {{P}roceedings of {S}{P}{I}{E}},
    year = {2007},
    volume = {6589},
    pages = {452--460},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/CP2007_Cervenka_1.pdf},
    doi = {10.1117/12.721979}
}