@inproceedings{TUW-290264, author = {Scharinger, Alexander and Manstetten, Paul and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{G}enerative {M}odel {B}ased {A}daptive {I}mportance {S}ampling for {F}lux {C}alculations in {P}rocess {T}{C}{A}{D}}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2020}, pages = {39--42}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2020/CP2020_Scharinger_1.pdf}, doi = {10.23919/SISPAD49475.2020.9241615}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}obe, {J}apan - virtual; 2020-09-23 -- 2020-10-06} }