@inproceedings{TUW-290266, author = {Klemenschits, Xaver and Selberherr, Siegfried and Filipovic, Lado}, title = {{G}eometric {A}dvection {A}lgorithm for {P}rocess {E}mulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2020}, pages = {59--62}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2020/CP2020_Klemenschits_1.pdf}, doi = {10.23919/SISPAD49475.2020.9241678}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}obe, {J}apan - virtual; 2020-09-23 -- 2020-10-06} }