@inproceedings{TUW-290275, author = {Milardovich, Diego and Jech, Markus and Waldh{\"o}r, Dominic and Waltl, Michael and Grasser, Tibor}, title = {{M}achine {L}earning {P}rediction of {F}ormation {E}nergies in a-{S}i{O}2}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2020}, pages = {339--342}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2020/CP2020_Milardovich_1.pdf}, doi = {10.23919/SISPAD49475.2020.9241609}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}obe, {J}apan - virtual; 2020-09-23 -- 2020-10-06} }