@incollection{TUW-291576, author = {Grasser, Tibor and Langer, Erasmus and Selberherr, Siegfried}, title = {{I}nstitut f{\"u}r {M}ikroelektronik}, booktitle = {{D}ie {F}akult{\"a}t f{\"u}r {E}lektrotechnik und {I}nformationstechnik}, year = {2015}, editor = {Unterrainer, Karl}, pages = {57--62}, publisher = {{B}{\"o}hlau}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2020/BC2020_Grasser_1.pdf}, isbn = {978-3-205-20128-1}, doi = {10.7767/9783205202240-006} }