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@article{TUW-293874,
    author = {Berens, Judith and Pobegen, Gregor and Grasser, Tibor},
    title = {{Tunneling Effects in NH{$_{3}$} Annealed 4H-SiC Trench MOSFETs}},
    journal = {{M}aterials {S}cience {F}orum},
    year = {2020},
    volume = {1004},
    pages = {652--658},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2020/JB2020_Berens_1.pdf},
    doi = {10.4028/www.scientific.net/MSF.1004.652}
}