@article{TUW-293874, author = {Berens, Judith and Pobegen, Gregor and Grasser, Tibor}, title = {{Tunneling Effects in NH{$_{3}$} Annealed 4H-SiC Trench MOSFETs}}, journal = {{M}aterials {S}cience {F}orum}, year = {2020}, volume = {1004}, pages = {652--658}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2020/JB2020_Berens_1.pdf}, doi = {10.4028/www.scientific.net/MSF.1004.652} }