@inproceedings{TUW-297929, author = {Filipovic, Lado and Klemenschits, Xaver}, title = {{F}ast {M}odel for {D}eposition in {T}renches using {G}eometric {A}dvection}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2021}, pages = {224--228}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Filipovic_5.pdf}, doi = {10.1109/SISPAD54002.2021.9592595}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {D}allas, {T}exas ({U}{S}{A}); 2021-09-27 -- 2021-09-29} }