@inproceedings{TUW-297930, author = {Klemenschits, Xaver and Selberherr, Siegfried and Filipovic, Lado}, title = {{C}ombined {P}rocess {S}imulation and {E}mulation of an {S}{R}{A}{M} {C}ell of the 5nm {T}echnology {N}ode}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2021}, pages = {23--27}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Klemenschits_1.pdf}, doi = {10.1109/SISPAD54002.2021.9592605}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {D}allas, {T}exas ({U}{S}{A}); 2021-09-27 -- 2021-09-29} }