@article{TUW-297943, author = {Aguinsky, Luiz Felipe and Wachter, Georg and Manstetten, Paul and Rodrigues, Francio and Trupke, Michael and Schmid, Ulrich and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{M}odeling and {A}nalysis of {S}ulfur {H}exafluoride {P}lasma {E}tching for {S}ilicon {M}icrocavity {R}esonators}, journal = {{J}ournal of {M}icromechanics and {M}icroengineering}, year = {2021}, volume = {31}, number = {12}, pages = {125003-1--125003-9}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Aguinsky_1.pdf}, doi = {10.1088/1361-6439/ac2bad} }