@article{TUW-298030,
author = {Triendl, Fabian and Pfusterschmied, Georg and Schwarz, Sabine and Pobegen, Gregor and Konrath, J.P. and Schmid, Ulrich},
title = {{B}arrier height tuning by inverse sputter etching at poly-{S}i/4{H}-{S}i{C} heterojunction diodes},
journal = {{S}emiconductor {S}cience and {T}echnology},
year = {2021},
volume = {36},
number = {055021},
pages = {1--8},
doi = {10.1088/1361-6641/abf29b}
}