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@article{TUW-298032,
    author = {Triendl, Fabian and Pfusterschmied, Georg and Pobegen, Gregor and Schwarz, Sabine and Artner, Werner and Konrath, J.P. and Schmid, Ulrich},
    title = {{G}rowth and characterization of low pressure chemical vapor deposited {S}i on {S}i-face 4{H}-{S}i{C}},
    journal = {{M}aterials {S}cience in {S}emiconductor {P}rocessing},
    year = {2021},
    volume = {131},
    number = {105888},
    pages = {1--8},
    doi = {10.1016/j.mssp.2021.105888}
}