@mastersthesis{TUW-300812, author = {Weger, Magdalena}, title = {{E}lektrische {C}harakteriserung von {S}i{C} {T}rench {M}{O}{S}{F}{E}{T}s mittels {D}{L}{T}{S} and {A}dmittanz {S}pektroskopie}, school = {{E}360}, year = {2021} }