@inproceedings{TUW-302976, author = {Franco, J. and Marneffe, J.-F. and Vandooren, Anne and Arimura, H and Ragnarsson, L. A. and Claes, Dieter and Litta, Eugenio Dentoni and Horiguchi, N. and Croes, Kristof and Linten, D and Grasser, Tibor and Kaczer, Ben}, title = {{Low Temperature Atomic Hydrogen Treatment for Superior NBTI Reliability -- Demonstration and Modeling across SiO{$_{2}$} IL Thicknesses from 1.8 to 0.6 nm for I/O and Core Logic}}, booktitle = {2021 {S}ymposium on {V}{L}{S}{I} {T}echnology ({V}{L}{S}{I}{T})}, year = {2021}, pages = {1--2}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Grasser_3.pdf}, isbn = {978-1-6654-1945-1}, note = {talk: {I}nternational {S}ymposium on {V}{L}{S}{I} {T}echnology, {K}yoto, {J}apan; 2021-06-13 -- 2021-06-19} }