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@article{TUW-303523,
    author = {Aguinsky, Luiz Felipe and Rodrigues, Francio and Wachter, Georg and Trupke, Michael and Schmid, Ulrich and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{P}henomenological {M}odeling of {L}ow-{B}ias {S}ulfur {H}exafluoride {P}lasma {E}tching of {S}ilicon},
    journal = {{S}olid-{S}tate {E}lectronics},
    year = {2022},
    volume = {191},
    pages = {108262-1--108262-8},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2022/JB2022_Aguinsky_1.pdf},
    doi = {10.1016/j.sse.2022.108262},
    note = {invited}
}