@article{TUW-303523, author = {Aguinsky, Luiz Felipe and Rodrigues, Francio and Wachter, Georg and Trupke, Michael and Schmid, Ulrich and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{P}henomenological {M}odeling of {L}ow-{B}ias {S}ulfur {H}exafluoride {P}lasma {E}tching of {S}ilicon}, journal = {{S}olid-{S}tate {E}lectronics}, year = {2022}, volume = {191}, pages = {108262-1--108262-8}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2022/JB2022_Aguinsky_1.pdf}, doi = {10.1016/j.sse.2022.108262}, note = {invited} }