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@article{TUW-303616,
    author = {Reiter, Tobias and Klemenschits, Xaver and Filipovic, Lado},
    title = {{I}mpact of {P}lasma {I}nduced {D}amage on the {F}abrication of 3{D} {N}{A}{N}{D} {F}lash {M}emory},
    journal = {{S}olid-{S}tate {E}lectronics},
    year = {2022},
    volume = {192},
    pages = {108261-1--108261-9},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2022/JB2021_Reiter_1.pdf},
    doi = {10.1016/j.sse.2022.108261},
    note = {invited}
}