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@phdthesis{TUW-303818,
    author = {Klemenschits, Xaver},
    title = {{E}mulation and {S}imulation of {M}icroelectronic {F}abrication {P}rocesses},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2022}
}