@incollection{TUW-304078, author = {Lenz, Christoph and Scharinger, Alexander and Manstetten, Paul and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{A} {N}ovel {S}urface {M}esh {S}implification {M}ethod for {F}lux-{D}ependent {T}opography {S}imulations of {S}emiconductor {F}abrication {P}rocesses}, booktitle = {{S}cientific {C}omputing in {E}lectrical {E}ngineering}, year = {2021}, editor = {van Beurden, Martijn and Budko, Neil and Schilders, Wil}, pages = {73--81}, publisher = {{S}pringer}, url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/BC2021_Lenz_2.pdf}, isbn = {978-3-030-84238-3}, doi = {10.1007/978-3-030-84238-3{\_}8} }