@inproceedings{TUW-304602, author = {Aguinsky, Luiz Felipe and Rodrigues, Francio and Klemenschits, Xaver and Filipovic, Lado and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{M}odeling {N}on-{I}deal {C}onformality during {A}tomic {L}ayer {D}eposition in {H}igh {A}spect {R}atio {S}tructures}, booktitle = {{S}{I}{S}{P}{A}{D} 2022: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices - {C}onference {A}bstract {B}ooklet}, year = {2022}, pages = {40--41}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D} 2022), {G}ranada, {S}pain; 2022-09-06 -- 2022-09-08} }