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@inproceedings{TUW-304607,
    author = {Lenz, Christoph and Manstetten, Paul and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{A}utomatic {G}rid {R}efinement for {T}hin {M}aterial {L}ayer {E}tching in {P}rocess {T}{C}{A}{D} {S}imulations},
    booktitle = {{S}{I}{S}{P}{A}{D} 2022: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices - {C}onference {A}bstract {B}ooklet},
    year = {2022},
    pages = {11--12},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D} 2022), {G}ranada, {S}pain; 2022-09-06 -- 2022-09-08}
}