@article{TUW-304608, author = {Lenz, Christoph and Manstetten, Paul and Aguinsky, Luiz Felipe and Rodrigues, Francio and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {{A}utomatic {G}rid {R}efinement for {T}hin {M}aterial {L}ayer {E}tching in {P}rocess {T}{C}{A}{D} {S}imulations}, journal = {{S}olid-{S}tate {E}lectronics}, year = {2022}, volume = {200}, number = {10258}, doi = {10.1016/j.sse.2022.108534}, keywords = {{P}rocess technology computer-aided design, {T}opography simulation, {L}evel-set method, {H}ierarchical grids, {L}ight-emitting diodes}, note = {invited} }