@inproceedings{TUW-304610, author = {Rodrigues, Francio and Aguinsky, Luiz Felipe and H{\"o}ssinger, Andreas and Weinbub, Josef}, title = {3{D} {F}eature-{S}cale {M}odeling of {H}ighly {S}elective {F}luorocarbon {P}lasma {E}tching}, booktitle = {{S}{I}{S}{P}{A}{D} 2022: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices - {C}onference {A}bstract {B}ooklet}, year = {2022}, pages = {32--33}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D} 2022), {G}ranada, {S}pain; 2022-09-06 -- 2022-09-08} }