C. Pichler, R. Plasun, R. Strasser, S. Selberherr:
"Simulation of Complete VLSI Fabrication Processes with Heterogeneous Simulation Tools";
IEEE Transactions on Semiconductor Manufacturing, 12 (1999), 1; S. 76 - 86.
http://dx.doi.org/10.1109/66.744527Elektronische Version der Publikation:
http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1999_Pichler_1.pdf