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Z. Djinovic, L. Manojlovic, M.C. Tomic:
"Non-destructive characterization of multilayer structures by low-coherence interferometry";
Poster: 4M 2007 - Third International conference on multi-material micro manufacture, Borovets, Bulgaria; 03.10.2007 - 05.10.2007; in: "4M 2007 - Third international Conference on multi-material micro manufacture - Proceedings", (2007), ISBN: 978-1904445-53-1; S. 165 - 168.

We present here a non-destructive technique for characterization of multilayer structures based on low-coherence interferometry. This technique is capable to give information of physical thickness and index of refraction of the subjected sample regardless of how many different layers exist along the optical trip. The main limitation is if the investigated materials are transparent for the used optical wavelength. We performed sensing set up in the form of single-mode fiber-optic Michelson interferometer composed of one 2×2 optical coupler. There were tested three and five layers foils composed of sandwich structure made by alternation of polyarilate (PAR) and glue layer. We achieved a success discriminate the interface between the two different materials with accuracy of about 40 nm by analyzing
low-coherence interferograms.

Projektleitung Werner Brenner:
Methoden und Werkzeuge für Handhabung und Montage in der Mikrodimension (Tech. abgeschlossen 2007)