[Zurück]

J. Matovic, Z. Jaksic:
"Bimaterial actuators and sensor with built-in compensation of the ambient temperature interference";
Vortrag: 4M 2007 - Third International conference on multi-material micro manufacture, Borovets, Bulgaria; 03.10.2007 - 05.10.2007; in: "4M 2007 - Third international Conference on multi-material micro manufacture - Proceedings", (2007), ISBN: 978-1904445-53-1; S. 151 - 154.

We present a novel simple and efficient method for the full removal of the influence of ambient temperature variations to the operation of bimaterial-based MEMS actuators and sensors. The removal of the undesired interference is achieved through the very structure of the bimaterial cantilever, by reversing the order of bimaterial
constituent materials at a certain length. Thus an extremely simple geometry is obtained for full self-compensation of the structures. We performed the full simulation of our devices by the finite element method. The structures require standard surface micromachining and utilize only Si-technology compatible materials like polyimides or SU-8. A simple rule for the determination of the zero-deflection condition is presented. The described compensation method enables
a significantly reduced bimaterial device area and a much higher packaging density in element arrays, as well as an improved signal-to-noise ratio. The method is especially convenient for photodetector arrays for direct conversion of infrared radiation spatial distribution into a visible image.

MEMS, temperature sensor, thermal actuator, bimaterial cantilever