J. Cervenka, H. Ceric, S. Selberherr:
"Three-Dimensional Simulation of Sacrificial Etching";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 14 (2008), 4-5; S. 665 - 671.
http://dx.doi.org/10.1007/s00542-007-0491-1Elektronische Version der Publikation:
http://www.iue.tuwien.ac.at/pdf/ib_2008/JB2007_Cervenka_1.pdf