[Zurück]

P. Svasek, E. Svasek, B. Lendl, M. Vellekoop:
"Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding";
Sensors and Actuators A: Physical, 115 (2004), S. 591 - 599.

In this paper, a technol. is presented for the batch-fabrication of fluidic devices which combines polymer and metal layers. The structures are fabricated by means of two-layer lithog. and SU-8-based wafer bonding technique. The combination of SU-8 and metal layers allows the fabrication of "2(1/2)"-dimensional fluidic structures. Different types of micromixers are realized for the investigation of chem. reactions by time resolved FTIR-spectroscopy, a flow-through-cell for IR-detection in capillary electrophoresis (CE) and a CE device with integrated capillary.

http://aleph.ub.tuwien.ac.at/F?base=tuw01&func=find-c&ccl_term=AC04969557

http://publik.tuwien.ac.at/files/pub-tch_4309.pdf