Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
T. Manzaneque, J. Hernando-Garcia, L. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J.L. Sànchez-Rojas:
"Analysis of the Quality Factor of Piezoelectric-Actuated Micro- Resonators";
Vortrag: SPIE Europe: Microtechnologies for the New Millennium,
Dresden, Deutschland;
04.05.2009
- 08.05.2009; in: "Proceedings of SPIE",
Society of Photo-Optical Instrumentation Engineers (SPIE,
7362-7366
(2009),
11 S.
Kurzfassung englisch:
The behaviour of AlN self-actuated beams for potential applications in the field of resonant sensors is analyzed focusing on the characterization of the quality factor. This study is extended to high-order modes up to 7 MHz. Laser Doppler vibrometry and impedance analysis were the measurement techniques used. For the former, the quality factor (Q factor) is deduced from both, the frequency response and the transient response. The impedance measurement is not possible for all the modes due to the symmetry in the modal shape, but when it can be measured, the Q factor may be deduced either
from the characteristic frequencies of the resonance or from the equivalent resonant circuit. All the four methods yielded
comparable magnitudes for the Q factor in air. In order to validate the quality of the devices, and for comparison purposes, calculations based on finite element method were utilized, and a good agreement was found with measured data, regarding modal shapes and resonance frequencies of each mode.
Schlagworte:
Quality factor, resonators, piezoelectric, AlN
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.821651