Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
C. Bolzmacher, K. Bauer, U. Schmid, M. Hafez, H. Seidel:
"Robust Superelastic, Metallic Amplification Unit for Piezoelectric Microactuators";
Vortrag: SPIE Europe: Microtechnologies for the New Millennium,
Dresden, Deutschland;
04.05.2009
- 08.05.2009; in: "Proceedings of SPIE",
Society of Photo-Optical Instrumentation Engineers (SPIE,
7362-7366
(2009).
Kurzfassung englisch:
In this work, a robust metallic amplification unit for piezoelectric microactuators is presented. The mechanism which is implemented with a sliced membrane structure made from a superelastic nickel titanium alloy is based on a mechanical lever in order to amplify the small piezoelectrically induced deformation. Therefore, increased stroke can be provided up to high frequencies. The fabrication process using laser ablation, the assembly process, the static and dynamic simulations and experimental measurements are reported. An amplification factor of 9 has been achieved for a specific load transmission point position. The dynamic response shows a quality factor of 25 at 11.97 kHz for the first mode. Compared to silicon, nickel titanium shows enhanced properties against failure and facilitates the integration process.
Schlagworte:
piezoelectric microactuator, amplification unit, superelastic NiTi alloy
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.821727