Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
J. Matovic, N. Adamovic, U. Schmid, Z. Jaksic:
"Nanomembranes - a link between MEMS and NEMS";
Poster: Mikrosystemtechnik Kongress 2009,
Berlin, D;
12.10.2009
- 14.10.2009; in: "Mikrosystemtechnik Kongress 2009 - Proceedings",
VDE Verlag,
(2009),
ISBN: 978-3-8007-3183-1.
Kurzfassung englisch:
This paper presents some properties of nanomembranes (i.e. nanometer-thin, freestanding, self-supported planar structures) as well as some of their applications in various MEMS devices. Nanomembranes belong both to the nanostructures (due to their thickness which is in the range 1 to 100 nm) and to the MEMS (due to the areas which may be up to a few millimeter square, even a centimeter square). The integration of the nanomembranes into MEMS devices open a wide area of novel possibilities, not available with traditional MEMS membranes.