[Zurück]

A. Alamin Dow, N. Kherani, C. Popov, A. Ahmed, U. Schmid:
"Nanocrystalline Diomond/AlN Structures for High Efficient SAW Nano-Resonators";
Vortrag: International Symposium on Applications of Ferroelectrics (ISAF) - 2012, Aveiro, P; 09.07.2012 - 13.07.2012; in: "International Symposium on Applications of Ferroelectrics (ISAF) - 2012", IEEE, IEEE Xplore (2012), ISBN: 978-1-4673-2669-8.

Over the last decades, surface acoustic wave (SAW)
devices have been involved in a variety of applications including
communication systems, physical and chemical sensors and lab
on chip. However, increasing demand in high volume
communication systems and ultrasensitive sensors has called for
advanced SAW devices that can operate at higher frequencies
(GHz) while maintaining low insertion levels. Owing to its
properties such as very high acoustic velocity, nanocrystalline
diamond (NCD) has been utilized for the realization of a high
frequency SAW nano-resonators. In this work, we report on the
development, fabrication and testing of SAW devices based on
aluminum nitride (AlN) and NCD architecture. The NCD films
were deposited using microwave plasma enhanced chemical
vapour deposition (MWPECVD). The NCD synthesis process
details are presented and discussed. An optimized electron beam
lithography (EBL) process was used for the realization of high
frequency fine resolution SAW nano-resonators on AlN/NCD bilayer.
The fabricated device exhibited a resonance frequency of
11.3 GHz yielding an acoustic velocity of 9040 m/s.

Over the last decades, surface acoustic wave (SAW)
devices have been involved in a variety of applications including
communication systems, physical and chemical sensors and lab
on chip. However, increasing demand in high volume
communication systems and ultrasensitive sensors has called for
advanced SAW devices that can operate at higher frequencies
(GHz) while maintaining low insertion levels. Owing to its
properties such as very high acoustic velocity, nanocrystalline
diamond (NCD) has been utilized for the realization of a high
frequency SAW nano-resonators. In this work, we report on the
development, fabrication and testing of SAW devices based on
aluminum nitride (AlN) and NCD architecture. The NCD films
were deposited using microwave plasma enhanced chemical
vapour deposition (MWPECVD). The NCD synthesis process
details are presented and discussed. An optimized electron beam
lithography (EBL) process was used for the realization of high
frequency fine resolution SAW nano-resonators on AlN/NCD bilayer.
The fabricated device exhibited a resonance frequency of
11.3 GHz yielding an acoustic velocity of 9040 m/s.