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G. Schitter:
"High-speed AFM by mechatronic system integration";
Hauptvortrag: 2nd Workshop on Dynamics and Control of Micro and Nanoscale Systems, Newcastle, Australia (eingeladen); 23.02.2012 - 24.02.2012.

Mechatronic imaging systems, such as atomic force microscopes (AFM), wafer scanners, adaptive optics, and scanning laser microscopy, demand a continuous improvement of scanning- and positioning systems in terms of speed and actuation range while maintaining highest spatial resolution on the nanometer scale. This contribution discusses various developments to address these challenges and presents examples for AFM imaging.
Dual actuation enables a significant improvement of the positioning bandwidth while maintaining a large actuation range. For the short stroke actuator potential limitations of the feedback bandwidth can be avoided in the mechatronic design. The design of a model-based controller directly addresses the trade-off between the cross-over frequency and the potential fighting between both actuator loops.
Fast operation of scanning systems by means of iterative learning control allows for precise and high-speed scanning beyond the achievable bandwidth of feedback control and beyond the noise floor of the position sensor. Self-sensing actuation enables soft sensing and active damping of piezo-based nano-positioners without the need for explicit position sensors.
The presented examples demonstrate improvement of system performance and reduction of instrumentation costs, utilizing the interplay between process design and control design by mechatronic system integration.