[Zurück]

J. Kreith, C. Scheiner, W. Grosinger, C. Motz, G. Fantner, A. Deutschinger, T. Strunz, E. Fantner, M. J. Cordill:
"Combining AFM and SEM Techniques: An example on the investigation of dislocation processes in small scale plasticity";
Poster: 2012 MRS Fall Meeting & Exhibit, Boston, MA, USA; 25.11.2012 - 30.11.2012.

Many advantages arise with the combined imaging capabilities of the atomic force microscope (AFM) and the scanning electron microscope (SEM). AFSEM^TM is optimized for
co-localized AFM/SEM imaging for in-situ micromechanical testing and complex sample geometries. The precision cantilever positioning under SEM control is especially
important for imaging micro-sized pillars and beams where improper positioning could lead to destruction of the sample or damage of the cantilever tip. The special design of
the scanner and the cantilever holder allows short SEM working distances as low as 7mm permitting high resolution SEM imaging during simultaneous AFM scanning. First
quantitative step-height measurements on a deformed single crystal Cu-Zn samples demonstrate the benefits of the system.

Many advantages arise with the combined imaging capabilities of the atomic force microscope (AFM) and the scanning electron microscope (SEM). AFSEM^TM is optimized for
co-localized AFM/SEM imaging for in-situ micromechanical testing and complex sample geometries. The precision cantilever positioning under SEM control is especially
important for imaging micro-sized pillars and beams where improper positioning could lead to destruction of the sample or damage of the cantilever tip. The special design of
the scanner and the cantilever holder allows short SEM working distances as low as 7mm permitting high resolution SEM imaging during simultaneous AFM scanning. First
quantitative step-height measurements on a deformed single crystal Cu-Zn samples demonstrate the benefits of the system.