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M. Kucera, T. Manzaneque, J.L. Sànchez-Rojas, A. Bittner, U. Schmid:
"Quality Factor Enhancement of a Self-Actuated Piezoelectric MEMS Cantilever using Lock-in Driven Feedback Loop";
Poster: Mikroelektronik Tagung ME12, Wien; 23.04.2012 - 24.04.2012; in: "ME Tagung 2012", Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik, (2012), ISBN: 978-3-85133-071-7; S. 166 - 171.

Quality factor ampli.fication usually requires more effort
like analog circuit technology or optical measurement
equipment. This paper presents a different approach for
an all-electrical feedback loop to increase the quality factor
of a resonant microstructure. In this setup the current
of a piezoelectric aluminium nitride (AlN) actuated silicon
cantilever in combination with a current-to-voltage
( 1-V) converter is directly connected to a lock-in ampli.fier
working in X-Y mode which is synchronized to the stimulus.
The lock-in ampli.fier output signal X, the real part
of the 1-V converter output, is used to replace the original,
low Level, highly ampli.fied and thus noisy feedback
signal. A maximum value of the quality factor of about
8800 was achieved and with the measurement data the intrinsic
quality factor of the cantilever was calculated to
562. This value is in excellent agreement with the intrinsic
quality factor measured without feedback. Based on
this result, it is targeted to apply this approach for quality
factor enhancement to determine the intrinsic quality
factor of e.g. a cantilever operated in a viscous fluid.

Quality factor ampli.fication usually requires more effort
like analog circuit technology or optical measurement
equipment. This paper presents a different approach for
an all-electrical feedback loop to increase the quality factor
of a resonant microstructure. In this setup the current
of a piezoelectric aluminium nitride (AlN) actuated silicon
cantilever in combination with a current-to-voltage
( 1-V) converter is directly connected to a lock-in ampli.fier
working in X-Y mode which is synchronized to the stimulus.
The lock-in ampli.fier output signal X, the real part
of the 1-V converter output, is used to replace the original,
low Level, highly ampli.fied and thus noisy feedback
signal. A maximum value of the quality factor of about
8800 was achieved and with the measurement data the intrinsic
quality factor of the cantilever was calculated to
562. This value is in excellent agreement with the intrinsic
quality factor measured without feedback. Based on
this result, it is targeted to apply this approach for quality
factor enhancement to determine the intrinsic quality
factor of e.g. a cantilever operated in a viscous fluid.