L. Filipovic, S. Selberherr:
"A Method for Simulating Atomic Force Microscope Nanolithography in the Level Set Framework";
Microelectronic Engineering, 107 (2013), S. 23 - 32.
http://dx.doi.org/10.1016/j.mee.2013.02.083Elektronische Version der Publikation:
http://www.iue.tuwien.ac.at/pdf/ib_2012/JB2013_Filipovic_1.pdf