Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
T. Manzaneque, V Ruiz-Díez, J. Hernando-Garcia, E Wistrela, M. Kucera, A. Bittner, U. Schmid, J.L. Sànchez-Rojas:
"Oscillator Circuit Based On Piezoelectric Bending Micro-Resonator Operated In Liquid Media";
Vortrag: 24th Micromechanics and Microsystems Europe Conference - MME 2013,
Espoo, Finland;
01.09.2013
- 04.09.2013; in: "Proceedings",
(2013).
Kurzfassung englisch:
In this paper we present an oscillator circuit based on a piezoelectric microplate resonator under immersion in liquid media. After a brief description of the resonator, a modeling of its elec-trical behavior is presented, highlighting the im-portance of a suitable interface circuit to extract the electromechanical response and reject parasitic electrical effects. An additional phase shift circuit is proposed to condition the resulting signal for the oscillator requirements. Finally, a characterization of the whole system in both open and closed-loop configurations is presented, resulting in a frequency stability (Allan deviation) of 1.62·10-7, which im-proves the state-of-the-art values for MEMS in liquid media.
Schlagworte:
Oscillator, MEMS, piezoelectric, liquid