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V Ruiz-Díez, T. Manzaneque, J. Hernando-Garcia, A. Ababneh, M. Kucera, A. Al-Omari, A. Bittner, U. Schmid, H. Seidel, J.L. Sànchez-Rojas:
"Contour And Flexure-Actuated In-Plane Modes Of Aln-Based Piezoelectric Vibrating Mems";
Poster: SPIE Microtechnologies 2013, Grenoble, France; 24.04.2013 - 26.04.2013; in: "Proceedings of SPIE", 8763 (2013), ISSN: 0277-786x.

In this work, we study the modes of vibration for two different families of aluminium nitride-actuated piezoelectric
microstructures: contour modes and flexure-actuated modes. For the contour modes, the structure vibrates at frequencies
determined by its edge dimensions whereas for the flexure-actuated modes a suspended structure is displaced by the
lateral bending of the flexures. We combine electrical and optical techniques to fully characterize the vibrating modes of
these types of in-plane MEMS structures. An electronic speckle pattern interferometry technique is used for a full 3D
detection of the movement of the structures. Quality factors as high as 5000 and motional resistance as low as 4 KOhm
were obtained for in-plane modes in air and a quality factor as high as 300 was obtained for an in-plane structure with
water on the top surface. This work shows the great flexibility in the selection of resonant modes in piezoelectric
resonators and actuators, implemented by a proper design of the electrode layout geometry.

MEMS, piezoelectric, in-plane motion, AlN