S. Schmid:
"Organic Resonant MEMS Devices";
in: "Resonant MEMS: Principles, Modeling, Implementation and Application", Wiley-Vch, 2016, S. 1 - 20.
http://dx.doi.org/10.1002/9783527676330.ch10Elektronische Version der Publikation:
http://onlinelibrary.wiley.com/doi/10.1002/9783527676330.ch10/summary