M. F. Khan, S. Schmid, Z.J. Davis, S. Dohn, A. Boisen:
"Fabrication of resonant micro cantilevers with integrated transparent fluidic channel";
Microelectronic Engineering, 88 (2011), 8; S. 2300 - 2303.
http://dx.doi.org/10.1016/j.mee.2011.02.096Elektronische Version der Publikation:
http://www.sciencedirect.com/science/article/pii/S0167931711002231