T. Larsen, S. Keller, S. Schmid, S. Dohn, A. Boisen:
"Fabrication and Characterization of SRN/SU-8 Bimorph Cantilevers for Temperature Sensing";
Microelectronic Engineering, 88 (2011), 8; S. 2311 - 2313.
http://dx.doi.org/10.1016/j.mee.2010.12.015Elektronische Version der Publikation:
http://www.sciencedirect.com/science/article/pii/S0167931710004934