S. Schmid, P. Senn, C. Hierold:
"Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment";
Sensors and Actuators A: Physical, 145-146 (2008), S. 442 - 448.
http://dx.doi.org/10.1016/j.sna.2008.01.010Elektronische Version der Publikation:
http://www.sciencedirect.com/science/article/pii/S0924424708000502