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G. Schitter, A. Stemmer, F. Allgöwer:
"Robust 2DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy";
Vortrag: 2003 American Control Conference, Denver (USA); 04.06.2003 - 06.06.2003; in: "IEEE Proceedings of the 2003 American Control Conference", (2003), S. 3720 - 3725.

Utilizing modern model-based control methods improves
the performance of an atomic force microscope (AFM)
substantially when compared to the state of the art
commercial realizations. The design and implementation of
a two~degree-of-freedom (2DOF) controller on a
commercial AFM system is presented enabling topography
measurements on the nano-scale at higher scan rates with
reduced measurement error. The closed-loop operation of
the AFM system is performed by an H,,,-controller, while
the scanner is simultaneously tracked to the last scan line by
a model-based feedforward controller. Experimental results
obtained at 15 Hz line-scan rate exhibit a maximum control
error reduced by a factor of about 6 in comparison with the
commercial system.