Zeitschriftenartikel:
M. Kahr, M Stifter, H. Steiner, W. Hortschitz, G. Kovacs, A. Kainz, J. Schalko, F. Keplinger:
"Dual Resonator MEMS Magnetic Field Gradiometer";
Sensors,
19
(2019),
3;
S. 493.
Kurzfassung englisch:
Accurate knowledge of the spatial magnetic field distribution is necessary when measuring
field gradients. Therefore, a MEMS magnetic field gradiometer is reported, consisting of two identical,but independent laterally oscillating masses on a single chip. The sensor is actuated by Lorentz force and read out by modulation of the light flux passing through stationary and moving arrays of the chip. This optical readout decouples the transducer from the electronic components. Both
phase and intensity are recorded which reveals information about the uniformity of the magnetic field. The magnetic flux density is measured simultaneously at two points in space and the field
gradient is evaluated locally.
Schlagworte:
MEMS; Gradiometer; Lorentz force; magnetic field; sensor; optical readout
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/s19030493