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M. Jandak, T. Neuzil, J. Krausova, M. Schneider, U. Schmid:
"Mems Out Of Plane Actuator";
Patent: Europa, Nr. Ep 3 376 162 B1; eingereicht: 12.03.2018, erteilt: 20.11.2019.

A MEMS sensor device comprises a support substrate, a proof mass movably connected to the support substrate,
a first drive comb fixedly connected to the support substrate in a first orientation and adjacent to the proof mass,
and a second drive comb fixedly connected to the support substrate in a second orientation and adjacent to the proof
mass. The second orientation is opposite of the first orientation such that the first and second drive combs face toward
each other. A parallel plate sense electrode is located under the proof mass on the support substrate. The first and
second drive combs, and the parallel plate sense electrode, are each electrically charged and configured with respect
to the proof mass such that a combination of a levitation force and a parallel plate