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M. Dorfmeister, M. Schneider, Th. Grille, U. Hedenig, A. Dehe, M. Kaltenbacher, U. Schmid:
"A Micromechanical Device, an Array of Micromechanical Devices, a Method of Manufacturing a Micromechanical Device and a Method of Controlling a Micromechanical Device";
Patent: USA, Nr. Us 10516943b2; eingereicht: 04.05.2016, erteilt: 24.12.2019.

Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may include: a substrate; a diaphragm mechanically coupled to the substrate, the dia­phragm comprising a stressed region to buckle the dia­phragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, the actua­tor comprising a piezoelectric layer over the diaphragm; a controller configured to provide an electrical control signal in response to a digital sound input; wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.