BibTeX-Export: 1 Datensatz f{\"u}r alle [global] @inproceedings{TUW-265363, author = {Wang, Guodong and Hasani, Ramin and Yungang, Zhu and Grosu, Radu}, title = {A Novel Bayesian Network-Based Fault Prognostic Method for Semiconductor Manufacturing Process}, booktitle = {Proceedings of the 2017 Annual IEEE Industrial Electronics Society's 18th International Conference on Industrial Technology (ICIT 2017)}, year = {2017}, pages = {1450--1454}, publisher = {IEEE}, isbn = {978-1-5090-5321-6}, doi = {10.1109/ICIT.2017.7915579}, note = {talk: 2017 Annual IEEE Industrial Electronics Society's 18th International Conference on Industrial Technology (ICIT 2017), Toronto, ON, Canada; 2017-03-22 -- 2017-03-25} } 1 Datensatz ausgegeben