@inproceedings{TUW-246306, author = {Reitterer, J{\"o}rg and Fidler, Franz and Schmid, Gerhard and Hambeck, Christian and Saint Julien-Wallsee, Ferdinand and Leeb, Walter and Schmid, Ulrich}, title = {Input-shaped actuation of electromagnetic MEMS mirrors}, booktitle = {Proc. of SPIE Vol. 9517-9520}, year = {2015}, publisher = {SPIE}, address = {9517}, numpages = {7}, eid = {95170J}, issn = {0277-786x}, doi = {10.1117/12.2181241}, keywords = {Input shaping, electromagnetic MEMS mirror, open-loop control, oscillation suppression}, note = {talk: Smart Sensors, Actuators and MEMS VII - 2015, Barcelona, Spain; 2015-05-04 -- 2015-05-06} }