W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, S. Selberherr:
"Trajectory Split Method for Monte Carlo Simulation of Ion Implantation";
IEEE Transactions on Semiconductor Manufacturing, 8 (1995), 4; 402 - 407.
http://dx.doi.org/10.1109/66.475181Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Bohmayr_1.pdf