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J. Yunas, J. Johari, A. Hamzah, ?. Mimiwaty, I. Gebeshuber, B. Majlis:
"Design and Fabrication of MEMS Micropumps using Double Side Etching";
Journal of Microelectronics and Electronic Packaging, 7 (2010), 44 - 47.

In this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch technique at both sides of a silicon substrate is implemented at the same time for creating the pump membrane and the diffuser/nozzle elements. A planar diffuser and a nozzle element of the pump, as well as a 150 mm thick silicon membrane, are designed and fabricated using only three pattern process steps. An actuator-chamber and a pump-chamber with depths of 250 um are formed after 250 min KOH etching, while the diffuser/nozzle element with a depth of 50 um are sequentially formed after chamber forming. The process is simple and reproducible which opens the opportunity for fast prototyping of MEMS micropumps.