M. Kubicek, G. Holzlechner, A.K. Opitz, S. Larisegger, H. Hutter, J. Fleig:
"A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance";
Applied Surface Science, 289 (2014), S. 407 - 416.
http://dx.doi.org/10.1016/j.apsusc.2013.10.177Elektronische Version der Publikation:
http://publik.tuwien.ac.at/files/PubDat_227513.pdf